JPH0438035U - - Google Patents
Info
- Publication number
- JPH0438035U JPH0438035U JP8013090U JP8013090U JPH0438035U JP H0438035 U JPH0438035 U JP H0438035U JP 8013090 U JP8013090 U JP 8013090U JP 8013090 U JP8013090 U JP 8013090U JP H0438035 U JPH0438035 U JP H0438035U
- Authority
- JP
- Japan
- Prior art keywords
- impurities
- mixed gas
- semiconductor substrate
- diffusion
- core tube
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000009792 diffusion process Methods 0.000 claims description 6
- 239000012535 impurity Substances 0.000 claims description 4
- 239000004065 semiconductor Substances 0.000 claims description 4
- 238000003756 stirring Methods 0.000 claims description 4
- 239000000758 substrate Substances 0.000 claims description 3
- 239000013067 intermediate product Substances 0.000 description 1
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8013090U JPH0438035U (en]) | 1990-07-27 | 1990-07-27 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8013090U JPH0438035U (en]) | 1990-07-27 | 1990-07-27 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0438035U true JPH0438035U (en]) | 1992-03-31 |
Family
ID=31624912
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8013090U Pending JPH0438035U (en]) | 1990-07-27 | 1990-07-27 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0438035U (en]) |
-
1990
- 1990-07-27 JP JP8013090U patent/JPH0438035U/ja active Pending
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